Apex semi-cap application overview

Overview

Apex Microtechnology’s product family of power operational amplifiers and PWM amplifiers deliver the maximum performance, cost effectiveness, and high voltage demands of a wide variety of automated manufacturing and test equipment used in the semiconductor industry.

Focused Ion Beam Equipment

Focused Ion Beam Equipment Schematic

Electromagnetic, electrostatic, and dynamic focus control are the most common deflection applications for Apex Microtechnology power operational amplifiers. These devices deliver exceptional combinations of high speed, high current and high voltage operation. A design rule of thumb for deflection circuits is to select an amplifier with a minimum slew rate equal to 10 times faster than the desired slew rate to ensure crisp settling performance. For electromagnetic deflection, a combination of high speed and high current is the optimal combination, along with an extended supply range, so the amplifier can slew the current in the yoke rapidly. High-voltage operational amplifiers are best suited to electrostatic deflection and/or focus. Apex Microtechnology brand products offer slew rate performance from a low of 100 V/µs to an industry first 3,000 V/µs for a single-package solution. Operating voltages range from 50 V to 450 V single supply, and output current capabilities range from 0.04 A to 15 A.

  • More than 20 models of high-speed operational amplifiers
  • High output current capabilities
  • Wide supply voltage operation
  • Circuit protection built in
  • IC, hybrid, and open frame module product designs

Inspection Systems

Inspection System Schematic

Apex Microtechnology offers more than 50 models of power operational amplifiers for use as high-voltage drivers in popular applications that include programmable power supplies, pin drivers and waveform generators. This product family of high-voltage operational amplifiers features various combinations of very wide supply voltages and very high slew rates.

  • Multiple combinations of high-voltage, high-speed
  • Voltage supply operation up to ±600 V
  • Slew rates as high as 3,000 V/µs
  • Circuit protection built in
  • IC, hybrid, and open frame module product designs

Lithography Systems

Lithography System Schematic

Electromagnetic, electrostatic, and dynamic focus control are the most common deflection applications for Apex Microtechnology power operational amplifiers. These devices deliver exceptional combinations of high speed, high current and high voltage operation. A design rule of thumb for deflection circuits is to select an amplifier with a minimum slew rate equal to 10 times faster than the desired slew rate to ensure crisp settling performance. For electromagnetic deflection, a combination of high speed and high current is the optimal combination, along with an extended supply range, so the amplifier can slew the current in the yoke rapidly. High-voltage operational amplifiers are best suited to electrostatic deflection and/or focus. Apex Microtechnology brand products offer slew rate performance from a low of 100 V/µs to an industry first 3,000 V/µs for a single-package solution. Operating voltages range from 50 V to 450 V single supply, and output current capabilities range from .04 A to 15 A.

  • More than 20 models of high-speed operational amplifiers
  • High output current capabilities
  • Wide supply voltage operation
  • Circuit protection built in
  • IC, hybrid, and open frame module product designs

Test Instrument

Test Instrument Schematic

Apex Microtechnology offers cost-effective power amplifier and power booster solutions for use as high voltage and high current programmable power supplies. This product family of linear power amplifiers features various combinations of very high output current and wide supply voltage which allow the programmable power supply to be scalable by simply selecting among pin compatible amplifiers and current limit programming resistors. For example, a programmable power supply circuit can be configured to deliver .35 A, 7 A or 14 A PEAK at output voltages up to 380 Vp-p.

  • Multiple combinations of high current, high voltage
  • Current capabilities up to 50 A continuous
  • Wide supply voltage operation
  • High power bandwidth
  • Circuit protection built in
  • IC, hybrid, and open frame module product designs

Wire Bonder

Wire Bonder Schematic

A programmable current source is a common circuit for linear control of a valve. The Apex Microtechnology product family of high-current linear power amplifiers provides a variety of performance options for proportional valve control applications in grounded or floating load configurations. Depending on the specific demands of the circuitry, product selection can be based on high current and voltage supply, or high current and linearity of the Class A/B Output.

  • Multiple combinations of high current, high voltage
  • High current output up to 50 A
  • Wide voltage supply operation ±2.5 V to ±200V
  • Excellent linearity – Class A/B Output
  • Circuit protection built in
  • IC, hybrid, and open frame module product designs

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